| Application | 원수, 재이용수, UPW, RO |
| Parameter | Urea |
| Measurement Range | 2….150 ppb as Urea |
| Limit of Detection | 1.5 ppb |
| Accuracy | 10 % |
| Repeatabilty | 5 % |
| Time Resolution | 60 min |
| Sample | Liquid |
| Operation Mode | Online, Manual |
수처리
식품
반도체
제약
Features
Urea는 반도체 제조용 초순수(UPW)에서 오염 물질로, 총유기탄소(TOC) 농도를 증가시키며 포토리소그래피 공정에 부정적인 영향을 미칠 수 있어서 주기적으로 Urea를 모니터링하는 게 중요합니다.
Specification
Principle | Liquid Chromatography Analysis |
Detector | UVD |
Measurement Range | 3…750 ppb as urea |
Limit of Detection | 1.5 ppb |
Accuracy | 10 % |
Repeatability | 5 % |
Sampling Channels | 4 channels |
Volume per Sample | < 100 mL |
Measurement Time | 1 hr |
Sample Characteristic | Conductivity: 0.05...1000 ㎲/cm |
Sample Pressure | Max 10 bar (145 psi) |
Phosphate Buffer | 0.65 mL/min |
Operating Mode | - Automatic / Selectable Sequence or Manual Single Measurements |
Operating Environment | 0...90 % Relative Humidity, Non-Condensing |
Analog Output | 4-20mA - 4 Channels |
Serial Interface | Modbus |
Electrical Supply | 110...240 VAC, 50/60 Hz, 220 W |
Power Consumption | 0.5 kW |
Dimensions | 660 x 800 x 1800 mm |
Weight | 120 kg |
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